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ORCID"Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor."
Grace M. Kepler et al. (2002)
- Grace M. Kepler, H. T. Banks, Hien T. Tran
, S. C. Beeler:
Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor. SIAM J. Appl. Math. 62(4): 1251-1280 (2002)
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