"Four-Level Micro-Via Technology (4LµV) for ASIC Integration in ..."

Maolei Zhou, Chresten von der Heide, Andreas Dietzel (2022)

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DOI: 10.3390/S22134723

access: open

type: Journal Article

metadata version: 2022-09-26

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Maolei Zhou, Chresten von der Heide, Andreas Dietzel:
Four-Level Micro-Via Technology (4LµV) for ASIC Integration in Active Flexible Sensor Arrays. Sensors 22(13): 4723 (2022)

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