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"Analytic Design of Segmented Phase Grating for Optical Sensing in ..."

Guanghua Yang et al. (2021)

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DOI: 10.3390/S21113805

access: open

type: Journal Article

metadata version: 2021-06-17

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Guanghua Yang, Jing Li, Yu Wang, Minxia Ding, Lina Zhong:
Analytic Design of Segmented Phase Grating for Optical Sensing in High-Precision Alignment System. Sensors 21(11): 3805 (2021)

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