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"Manufacture and Characterization of High Q-Factor Inductors Based on ..."
Ming-Zhi Yang, Ching-Liang Dai, Jin-Yu Hong (2011)
- Ming-Zhi Yang, Ching-Liang Dai
, Jin-Yu Hong:
Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques. Sensors 11(10): 9798-9806 (2011)
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