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"A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass ..."
Bo Xie et al. (2015)
- Bo Xie, Yonghao Xing, Yanshuang Wang, Jian Chen
, Deyong Chen, Junbo Wang:
A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging. Sensors 15(9): 24257-24268 (2015)
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