"A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional ..."

Weizhong Wang, Yulong Zhao, Yafei Qin (2012)

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DOI: 10.3390/S120404051

access: open

type: Journal Article

metadata version: 2022-10-02

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Weizhong Wang, Yulong Zhao, Yafei Qin:
A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements. Sensors 12(4): 4051-4064 (2012)

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