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"A Low Temperature Drifting Acoustic Wave Pressure Sensor with an ..."
Tao Wang et al. (2020)
- Tao Wang, Zhengjie Tang, Huamao Lin
, Kun Zhan, Jiang Wan, Shihao Wu, Yuandong Gu, Wenbo Luo, Wanli Zhang:
A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing. Sensors 20(6): 1788 (2020)
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