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"Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A ..."
Chen Wang et al. (2020)
- Chen Wang, Fang Chen
, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao
, Jian Bai, Huafeng Liu
, Michael Kraft
:
Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review. Sensors 20(14): 4054 (2020)
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