"Manufacturing and Testing of Radio Frequency MEMS Switches Using the ..."

Zung-You Tsai et al. (2021)

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DOI: 10.3390/S21041396

access: open

type: Journal Article

metadata version: 2024-08-04

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Zung-You Tsai, Po-Jen Shih, Yao-Chuan Tsai, Ching-Liang Dai:
Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process. Sensors 21(4): 1396 (2021)

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