"Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and ..."

Xinran Tan et al. (2017)

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DOI: 10.3390/S17112672

access: open

type: Journal Article

metadata version: 2018-11-14

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Xinran Tan, Fan Zhu, Chao Wang, Yang Yu, Jian Shi, Xue Qi, Feng Yuan, Jiubin Tan:
Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors. Sensors 17(11): 2672 (2017)

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