"A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding ..."

Peishuai Song et al. (2020)

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DOI: 10.3390/S20020337

access: open

type: Journal Article

metadata version: 2024-10-06

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Peishuai Song, Chaowei Si, Mingliang Zhang, Yongmei Zhao, Yurong He, Wen Liu, Xiaodong Wang:
A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology. Sensors 20(2): 337 (2020)

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