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"A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of ..."
Yuki Shimizu et al. (2018)
- Yuki Shimizu
, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen
, Xiuguo Chen
, Hiraku Matsukuma
, Wei Gao
:
A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions. Sensors 18(2): 398 (2018)
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