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"A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and ..."
Xiaoqing Shi et al. (2018)
- Xiaoqing Shi, Yulan Lu
, Bo Xie, Yadong Li, Junbo Wang, Deyong Chen, Jian Chen
:
A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. Sensors 18(8): 2494 (2018)
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