"Piezoresistive Sensitivity, Linearity and Resistance Time Drift of ..."

Changzhi Shi, Xiaowei Liu, Rongyan Chuai (2009)

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DOI: 10.3390/S90201141

access: open

type: Journal Article

metadata version: 2018-11-14

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  - https://dblp.org/rec/journals/sensors/ShiLC09
Changzhi Shi, Xiaowei Liu, Rongyan Chuai:
Piezoresistive Sensitivity, Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures. Sensors 9(2): 1141-1166 (2009)

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