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"Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring ..."

In-Ho Seong et al. (2022)

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DOI: 10.3390/S22166254

access: open

type: Journal Article

metadata version: 2022-12-05

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  - journals/sensors/SeongKLCLJYY22
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  - https://dblp.org/rec/journals/sensors/SeongKLCLJYY22
In-Ho Seong, Si-Jun Kim, Young-Seok Lee, Chul-Hee Cho, Jang-Jae Lee, Won-nyoung Jeong, Ye-Bin You, Shin-Jae You:
Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath. Sensors 22(16): 6254 (2022)

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