"Multi-Repeated Projection Lithography for High-Precision Linear Scale ..."

Dongxu Ren et al. (2016)

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DOI: 10.3390/S16040538

access: open

type: Journal Article

metadata version: 2020-10-26

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Dongxu Ren, Huiying Zhao, Chupeng Zhang, Daocheng Yuan, Jianpu Xi, Xueliang Zhu, Xinxing Ban, Longchao Dong, Yawen Gu, Chunye Jiang:
Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect. Sensors 16(4): 538 (2016)

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