Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot ..."

Haewook Park et al. (2024)

> Home

Details and statistics

DOI: 10.3390/S24061786

access: open

type: Journal Article

metadata version: 2024-05-04

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/ParkKCKJCL24
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/ParkKCKJCL24
Haewook Park, Juhyun Kim, Sungwon Cho, Kyunghyun Kim, Sungho Jang, Younsok Choi, Hohyun Lee:
Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis. Sensors 24(6): 1786 (2024)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.