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"Mass Sensors Based on Capacitive and Piezoelectric Micromachined ..."
Haleh Nazemi et al. (2020)
- Haleh Nazemi
, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani
, Tara Ahmadi, Yameema Babu Lopez, Arezoo Emadi:
Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT. Sensors 20(7): 2010 (2020)
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