"Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a ..."

Nathan Nakamura et al. (2024)

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DOI: 10.3390/S24092890

access: open

type: Journal Article

metadata version: 2024-06-18

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Nathan Nakamura, Paul Szypryt, Amber L. Dagel, Bradley K. Alpert, Douglas A. Bennett, William Bertrand Doriese, Malcolm Durkin, Joseph W. Fowler, Dylan T. Fox, Johnathon D. Gard, Ryan N. Goodner, James Zachariah Harris, Gene C. Hilton, Edward S. Jimenez, Burke L. Kernen, Kurt W. Larson, Zachary H. Levine, Daniel McArthur, Kelsey M. Morgan, Galen C. O'Neil, Nathan J. Ortiz, Christine G. Pappas, Carl D. Reintsema, Daniel R. Schmidt, Peter A. Schultz, Kyle R. Thompson, Joel N. Ullom, Leila Vale, Courtenay T. Vaughan, Christopher Walker, Joel C. Weber, Jason W. Wheeler, Daniel S. Swetz:
Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer. Sensors 24(9): 2890 (2024)

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