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"Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction."
Eloi Marigó et al. (2015)
- Eloi Marigó, Marc Sansa
, Francesc Pérez-Murano
, Arantxa Uranga
, Núria Barniol
:
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction. Sensors 15(7): 17036-17047 (2015)
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