"Enhancing AlN PMUTs' Acoustic Responsivity within a MEMS-on-CMOS Process."

Eyglis Ledesma et al. (2021)

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DOI: 10.3390/S21248447

access: open

type: Journal Article

metadata version: 2022-04-09

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Eyglis Ledesma, Iván Zamora, Arantxa Uranga, Francesc Torres, Núria Barniol:
Enhancing AlN PMUTs' Acoustic Responsivity within a MEMS-on-CMOS Process. Sensors 21(24): 8447 (2021)

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