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"Laser Scanning Confocal Thermoreflectance Microscope for the Backside ..."

Donguk Kim et al. (2017)

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DOI: 10.3390/S17122774

access: open

type: Journal Article

metadata version: 2018-11-14

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  - journals/sensors/KimJKLHNKC17
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  - https://dblp.org/rec/journals/sensors/KimJKLHNKC17
Donguk Kim, Chan Bae Jeong, Jung Dae Kim, Kye-Sung Lee, Hwan Hur, Ki-Hwan Nam, Geon-Hee Kim, Ki Soo Chang:
Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices. Sensors 17(12): 2774 (2017)

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