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ORCID"A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass."
Mohd Haris M. Khir, Peng Qu, Hongwei Qu (2011)
- Mohd Haris M. Khir, Peng Qu, Hongwei Qu
:
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass. Sensors 11(8): 7892-7907 (2011)
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