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"Design and Demonstration of a Microelectromechanical System Single-Ring ..."

Imran Khan et al. (2023)

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DOI: 10.3390/S23229234

access: open

type: Journal Article

metadata version: 2024-02-29

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Imran Khan, Ahmad Rahbar Ranji, Gnanesh Nagesh, David S.-K. Ting, Mohammed Jalal Ahamed:
Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors. Sensors 23(22): 9234 (2023)

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