"An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive ..."

Ahmed Khaled et al. (2022)

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DOI: 10.3390/S22030702

access: open

type: Journal Article

metadata version: 2022-02-23

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Ahmed Khaled, Ahmed M. Salman, Nawaf S. Aljehani, Ibrahim F. Alzahem, Ridha S. Almikhlafi, Radwan M. Noor, Yasser Mohammad Seddiq, Majed S. Al-Ghamdi, Mostafa Soliman, Mohamed A. E. Mahmoud:
An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode. Sensors 22(3): 702 (2022)

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