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"Development of a Large-Range XY-Compliant Micropositioning Stage with ..."

Ashenafi Abrham Kassa et al. (2024)

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DOI: 10.3390/S24020663

access: open

type: Journal Article

metadata version: 2024-02-29

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Ashenafi Abrham Kassa, Bijan Shirinzadeh, Kim Sang Tran, Kai Zhong Lai, Yanling Tian, Yanding Qin, Huaxian Wei:
Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control. Sensors 24(2): 663 (2024)

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