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"Reduction of White Spot Defects in CMOS Image Sensors Fabricated Using ..."
Takeshi Kadono et al. (2022)
- Takeshi Kadono
, Ryo Hirose
, Ayumi Onaka-Masada
, Koji Kobayashi, Akihiro Suzuki
, Ryosuke Okuyama
, Yoshihiro Koga, Atsuhiko Fukuyama, Kazunari Kurita
:
Reduction of White Spot Defects in CMOS Image Sensors Fabricated Using Epitaxial Silicon Wafer with Proximity Gettering Sinks by CH2P Molecular Ion Implantation. Sensors 22(21): 8258 (2022)
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