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"Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured ..."
Yuzhen Guo et al. (2023)
- Yuzhen Guo
, Zengxing Zhang
, Bin Yao, Jin Chai, Shiqiang Zhang, Jianwei Liu, Zhou Zhao, Chenyang Xue:
Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes. Sensors 23(13): 6061 (2023)
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