"A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin ..."

Ying Guo et al. (2022)

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DOI: 10.3390/S22082848

access: open

type: Journal Article

metadata version: 2024-09-19

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Ying Guo, Bo Li, Qi Zhang, Xiao-Ting He, Jun-Yi Sun:
A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration. Sensors 22(8): 2848 (2022)

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