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"Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS ..."

Aldo Ghisi et al. (2012)

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DOI: 10.3390/S121013985

access: open

type: Journal Article

metadata version: 2019-10-19

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  - journals/sensors/GhisiMCZ12
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  - https://dblp.org/rec/journals/sensors/GhisiMCZ12
Aldo Ghisi, Stefano Mariani, Alberto Corigliano, Sarah Zerbini:
Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer. Sensors 12(10): 13985-14003 (2012)

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