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"Fabrication and Characterization of a CMOS-MEMS Humidity Sensor."

John Ojur Dennis, Abdelaziz Yousif Ahmed, Mohd Haris M. Khir (2015)

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DOI: 10.3390/S150716674

access: open

type: Journal Article

metadata version: 2021-10-14

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  dblp key:
  - journals/sensors/DennisAK15
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  - https://dblp.org/rec/journals/sensors/DennisAK15
John Ojur Dennis, Abdelaziz Yousif Ahmed, Mohd Haris M. Khir:
Fabrication and Characterization of a CMOS-MEMS Humidity Sensor. Sensors 15(7): 16674-16687 (2015)

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