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"Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS ..."

Zhiyong Chen et al. (2018)

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DOI: 10.3390/S18082603

access: open

type: Journal Article

metadata version: 2020-12-28

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  - https://dblp.org/rec/journals/sensors/ChenGZZW18
Zhiyong Chen, Meifeng Guo, Rong Zhang, Bin Zhou, Qi Wei:
Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures. Sensors 18(8): 2603 (2018)

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