"Digital Platform for Wafer-Level MEMS Testing and Characterization Using ..."

Nuno Brito et al. (2016)

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DOI: 10.3390/S16091553

access: open

type: Journal Article

metadata version: 2024-06-18

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Nuno Brito, Carlos Ferreira, Filipe Alves, Jorge Cabral, João Gaspar, João Monteiro, Luís A. Rocha:
Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response. Sensors 16(9): 1553 (2016)

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