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"A concurrent pattern operation algorithm for VLSI mask data."

Akira Tsukizoe et al. (1987)

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DOI: 10.1002/SCJ.4690180210

access: closed

type: Journal Article

metadata version: 2023-09-13

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  - https://dblp.org/rec/journals/scjapan/TsukizoeKSMI87
Akira Tsukizoe, Tokinori Kozawa, Jun'ya Sakemi, Chihei Miura, Tatsuki Ishii:
A concurrent pattern operation algorithm for VLSI mask data. Syst. Comput. Jpn. 18(2): 98-108 (1987)

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