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"Identification for complicated shape objects by using stochastic fractal ..."

Masayoshi Kamijo, Shin-Ichi Aihara (1995)

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DOI: 10.1002/SCJ.4690260408

access: closed

type: Journal Article

metadata version: 2023-09-13

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Masayoshi Kamijo, Shin-Ichi Aihara:
Identification for complicated shape objects by using stochastic fractal variables - categorizing dust particles on LSI wafer surface. Syst. Comput. Jpn. 26(4): 74-83 (1995)

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