"Wafer yield prediction using derived spatial variables."

Hang Dong, Nan Chen, Kaibo Wang (2017)

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DOI: 10.1002/QRE.2192

access: closed

type: Journal Article

metadata version: 2020-07-09

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Hang Dong, Nan Chen, Kaibo Wang:
Wafer yield prediction using derived spatial variables. Qual. Reliab. Eng. Int. 33(8): 2327-2342 (2017)

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