"Model-based process capability indices: The dry-etching semiconductor case ..."

Riccardo Borgoni, Diego Zappa (2020)

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DOI: 10.1002/QRE.2698

access: closed

type: Journal Article

metadata version: 2021-12-25

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Riccardo Borgoni, Diego Zappa:
Model-based process capability indices: The dry-etching semiconductor case study. Qual. Reliab. Eng. Int. 36(7): 2309-2321 (2020)

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