"Chemo-mechanical polish lithography: A pathway to low loss large-scale ..."

Min Wang et al. (2019)

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DOI: 10.1002/QUE2.9

access: closed

type: Journal Article

metadata version: 2024-02-05

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  - https://dblp.org/rec/journals/qe/WangWLZFCC19
Min Wang, Rongbo Wu, Jintian Lin, Jianhao Zhang, Zhiwei Fang, Zhifang Chai, Ya Cheng:
Chemo-mechanical polish lithography: A pathway to low loss large-scale photonic integration on lithium niobate on insulator. Quantum Eng. 1(1) (2019)

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