"Analysis technology for VLSI fabrication."

Eugene S. Meieran, Paul A. Flinn, John R. Carruthers (1987)

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DOI: 10.1109/PROC.1987.13826

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type: Journal Article

metadata version: 2022-09-09

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Eugene S. Meieran, Paul A. Flinn, John R. Carruthers:
Analysis technology for VLSI fabrication. Proc. IEEE 75(7): 908-955 (1987)

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