"A BioMEMS review: MEMS technology for physiologically integrated devices."

Amy C. Richards Grayson et al. (2004)

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DOI: 10.1109/JPROC.2003.820534

access: closed

type: Journal Article

metadata version: 2025-02-17

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Amy C. Richards Grayson, Rebecca S. Shawgo, Audrey M. Johnson, Nolan T. Flynn, Yawen Li, Michael J. Cima, Robert Langer:
A BioMEMS review: MEMS technology for physiologically integrated devices. Proc. IEEE 92(1): 6-21 (2004)

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