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"Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an ..."

Andrew J. Flewitt, William I. Milne (2005)

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DOI: 10.1109/JPROC.2005.851533

access: closed

type: Journal Article

metadata version: 2020-10-02

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Andrew J. Flewitt, William I. Milne:
Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays. Proc. IEEE 93(7): 1364-1373 (2005)

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