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"Trends in advanced process technology - Submicrometer CMOS device design ..."

Dale M. Brown, Mario Ghezzo, Joseph M. Pimbley (1986)

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DOI: 10.1109/PROC.1986.13685

access: closed

type: Journal Article

metadata version: 2022-08-25

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Dale M. Brown, Mario Ghezzo, Joseph M. Pimbley:
Trends in advanced process technology - Submicrometer CMOS device design and process requirements. Proc. IEEE 74(12): 1678-1702 (1986)

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