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"Limits of nano-gate fabrication."

David R. Allee, Alec N. Broers, R. Fabian W. Pease (1991)

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DOI: 10.1109/5.92069

access: closed

type: Journal Article

metadata version: 2022-06-21

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David R. Allee, Alec N. Broers, R. Fabian W. Pease:
Limits of nano-gate fabrication. Proc. IEEE 79(8): 1093-1105 (1991)

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