"Measuring Photolithographic Overlay Accuracy and Critical Dimensions by ..."

H. Keith Nishihara, P. A. Crossley (1988)

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DOI: 10.1109/34.3864

access: closed

type: Journal Article

metadata version: 2017-05-17

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H. Keith Nishihara, P. A. Crossley:
Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions. IEEE Trans. Pattern Anal. Mach. Intell. 10(1): 17-30 (1988)

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