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"Evaluating the reliability level of virtual metrology results for flexible ..."

Pilsung Kang, Dongil Kim, Sungzoon Cho (2014)

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DOI: 10.1007/S10044-014-0386-6

access: closed

type: Journal Article

metadata version: 2023-03-21

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Pilsung Kang, Dongil Kim, Sungzoon Cho:
Evaluating the reliability level of virtual metrology results for flexible process control: a novelty detection-based approach. Pattern Anal. Appl. 17(4): 863-881 (2014)

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