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"Evaluating the reliability level of virtual metrology results for flexible ..."
Pilsung Kang, Dongil Kim, Sungzoon Cho (2014)
- Pilsung Kang, Dongil Kim
, Sungzoon Cho:
Evaluating the reliability level of virtual metrology results for flexible process control: a novelty detection-based approach. Pattern Anal. Appl. 17(4): 863-881 (2014)

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