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"Defect detection in patterned wafers using anisotropic kernels."

Maria Zontak, Israel Cohen (2010)

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DOI: 10.1007/S00138-008-0146-Y

access: closed

type: Journal Article

metadata version: 2017-05-17

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  - journals/mva/ZontakC10
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  - https://dblp.org/rec/journals/mva/ZontakC10
Maria Zontak, Israel Cohen:
Defect detection in patterned wafers using anisotropic kernels. Mach. Vis. Appl. 21(2): 129-141 (2010)

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