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"Dielectric charging in silicon nitride films for MEMS capacitive switches: ..."
Usama Zaghloul et al. (2009)
- Usama Zaghloul, George J. Papaioannou
, Fabio Coccetti, Patrick Pons
, Robert Plana
:
Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions. Microelectron. Reliab. 49(9-11): 1309-1314 (2009)
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