"Using EWMA control schemes for monitoring wafer quality in negative ..."

Fong-Jung Yu et al. (2011)

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DOI: 10.1016/J.MICROREL.2010.07.151

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type: Journal Article

metadata version: 2020-02-22

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Fong-Jung Yu, Yung-Yu Yang, Ming-Jaan Wang, Zhang Wu:
Using EWMA control schemes for monitoring wafer quality in negative binomial process. Microelectron. Reliab. 51(2): 400-405 (2011)

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