"Phase-shift imaging ellipsometer for measuring thin-film thickness."

Chih-Jen Yu et al. (2015)

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DOI: 10.1016/J.MICROREL.2014.10.014

access: closed

type: Journal Article

metadata version: 2020-02-22

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Chih-Jen Yu, Ching-Hung Hung, Kuei-Chu Hsu, Chien Chou:
Phase-shift imaging ellipsometer for measuring thin-film thickness. Microelectron. Reliab. 55(2): 352-357 (2015)

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