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"Field enhancement of omega-shaped-gated poly-Si TFT SONOS memory ..."
Chun-Yu Wu et al. (2010)
- Chun-Yu Wu, Ta-Chuan Liao, Ming-H Yu, Sheng-Kai Chen, Chung-Min Tsai, Huang-Chung Cheng:
Field enhancement of omega-shaped-gated poly-Si TFT SONOS memory fabricated by a simple sidewall spacer formation. Microelectron. Reliab. 50(5): 704-708 (2010)
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