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"Field enhancement of omega-shaped-gated poly-Si TFT SONOS memory ..."

Chun-Yu Wu et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.01.016

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/WuLYCTC10
Chun-Yu Wu, Ta-Chuan Liao, Ming-H Yu, Sheng-Kai Chen, Chung-Min Tsai, Huang-Chung Cheng:
Field enhancement of omega-shaped-gated poly-Si TFT SONOS memory fabricated by a simple sidewall spacer formation. Microelectron. Reliab. 50(5): 704-708 (2010)

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